ISO 14644-10:2013现行
Cleanrooms and associated controlled environments Part 10: Classification of surface cleanliness by chemical concentration
出版：International Organization for Standardization
专家解读视频
Describes the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
KS I ISO 14644-10:2014 - Identical
NF EN ISO 14644-10 : 2013 - Identical
DIN EN ISO 14644-10 : 2013 - Identical
SS-EN ISO 14644-10 : 2013 - Identical
GOST R ISO 14644-10 : 2014 - Identical
I.S. EN ISO 14644-10:2013 - Identical
NEN EN ISO 14644-10 : 2013 - Identical
NS EN ISO 14644-10 : 2013 - Identical
SN EN ISO 14644-10 : 2013 - Identical
UNI EN ISO 14644-10 : 2013 - Identical
DS EN ISO 14644-10 : 2013 - Identical
NBN EN ISO 14644-10 : 2013 - Identical
DIN EN ISO 14644-10 E : 2013 - Identical
PN EN ISO 14644-10 : 2013 - Identical
UNE EN ISO 14644-10 : 2014 - Identical
BS EN ISO 14644-10 : 2013 - Identical
