UNI EN ISO 14644-10 : 2013现行
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION
出版：Ente Nazionale Italiano di Unificazione (UNI)
专家解读视频
基本信息
标准编号： UNI EN ISO 14644-10 : 2013
标准类别：Standard
出版单位：Ente Nazionale Italiano di Unificazione (UNI)
标准页数：0
标准简介
Describes the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
