SS-EN ISO 14644-10 : 2013现行
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
出版：Standardiserings-Kommissionen I Sverige
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基本信息
标准编号： SS-EN ISO 14644-10 : 2013
标准类别：Standard
出版单位：Standardiserings-Kommissionen I Sverige
标准页数：0
标准简介
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
等同采用的国际标准
EN ISO 14644-10 : 2013 - Identical
ISO 14644-10 : 2013 - Identical
ISO 14644-10 : 2013 - Identical
