DIN EN ISO 14644-10 E : 2013现行
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION (ISO 14644-10:2013)
出版：German Institute for Standardisation (Deutsches Institut für Normung)
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基本信息
标准编号： DIN EN ISO 14644-10 E : 2013
发布时间：2013/1/1 0:00:00
标准类别：Standard
出版单位：German Institute for Standardisation (Deutsches Institut für Normung)
标准页数：37
标准简介
Describes the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
