I.S. EN 62047-2:2006现行
Semiconductor Devices - Micro-electromechanical Devices Part 2: Tensile Testing Method of Thin Film Materials
出版：National Standards Authority of Ireland
专家解读视频
Describes the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10 micro meter, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices.
IEC 62047-2 Ed. 1.0 - Identical
NF EN 62047-2:2006 - Identical
NBN EN 62047-2:2007 - Identical
DIN EN 62047-2 (2007-02) - Identical
BS EN 62047-2:2006 - Identical
BS EN 62047-2 : 2006 - Identical
IEC 62047-2 : 1.0 - Identical
EN 62047-2 : 2006 - Identical
NF EN 62047-2 : 2006 - Identical
NBN EN 62047-2 : 2007 - Identical
DIN EN 62047-2 : 2007 - Identical
BS EN 62047-2 : 2006 - Identical
DIN EN 62047-2 : 2007 - Identical
