IEC 62047-2 : 1.0现行
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 2: TENSILE TESTING METHOD OF THIN FILM MATERIALS
出版：International Electrotechnical Committee
专家解读视频
Defines the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10 [mu]m, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices.
NEN EN IEC 62047-2 : 2006 - Identical
PN EN 62047-2 : 2006 - Identical
I.S. EN 62047-2:2006 - Identical
DS EN 62047-2 : 2006 - Identical
DIN EN 62047-2 : 2007 - Identical
BS EN 62047-2 : 2006 - Identical
CEI EN 62047-2 : 2007 - Identical
