EN 62047-2 : 2006现行
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 2: TENSILE TESTING METHOD OF THIN FILM MATERIALS
出版：European Committee for Standards - Electrical
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基本信息
标准编号： EN 62047-2 : 2006
标准类别：Standard
出版单位：European Committee for Standards - Electrical
标准页数：0
标准简介
Specifies the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10[mu]m, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices.
