DIN EN 62047-2 (2007-02)现行
Semiconductor Devices - Micro-electromechanical Devices - Part 2: Tensile Testing Method Of Thin Film Materials
出版：German Institute for Standardisation (Deutsches Institut für Normung)
专家解读视频
Specifies the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10[mu]m, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices.
Supersedes DIN IEC 62047-2. (02/2007)
BS EN 62047-2:2006 - Identical
NBN EN 62047-2:2007 - Identical
IEC 62047-2 Ed. 1.0 - Identical
NF EN 62047-2:2006 - Identical
I.S. EN 62047-2:2006 - Identical
