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ISO 14644-9:2012现行

Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration

出版:International Organization for Standardization

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基本信息
标准编号: ISO 14644-9:2012
发布时间:2012/8/8 0:00:00
标准类别:Standard
出版单位:International Organization for Standardization
标准页数:26
标准简介

This part of ISO 14644 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications.