DIN EN ISO 14644-9 E : 2012现行
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 9: CLASSIFICATION OF SURFACE CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-9:2012)
出版：German Institute for Standardisation (Deutsches Institut für Normung)
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基本信息
标准编号： DIN EN ISO 14644-9 E : 2012
发布时间：2012/1/1 0:00:00
标准类别：Standard
出版单位：German Institute for Standardisation (Deutsches Institut für Normung)
标准页数：32
标准简介
Describes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications.
