BS EN ISO 14644-9:2012现行
Cleanrooms and associated controlled environments. Classification of surface cleanliness by particle concentration
出版：British Standards Institution
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基本信息
标准编号： BS EN ISO 14644-9:2012
发布时间：2012/8/31 0:00:00
标准类别：Standard
出版单位：British Standards Institution
标准页数：36
标准简介
Describes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications.
标准备注
© British Standards Institution 2013
等同采用的国际标准
ISO 14644-9:2012 - Identical
EN ISO 14644-9 : 2012 - Identical
ISO 14644-9 : 2012 - Identical
