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[SJ/T 31116-1994] PLA－501F型光刻机完好要求和检查评定方法[已废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31117-1994] 15B型磨片机完好要求和检查评定方法[已废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31118-1994] RS－H80H型外圆 磨机完好要求和检查评定方法[已废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31119-1994] 掩膜对准曝光机完好要求和检查评定方法[修订]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31120-1994] KSM－MJB3型掩膜对准曝光机完好要求和检查评定方法[已废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31121-1994] JB－VⅡ型掩膜对准曝光机完好要求和检查评定方法[已废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31128-1994] 近红外厚膜烧结炉完好要求和检查评定方法[已作废]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31130-1994] D051－22型高温氢气炉完好要求和检查评定方法[已废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31131-1994] 4304型扩散炉完好要求和检查评定方法[已废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31132-1994] ASM型微机扩散炉完好要求和检查评定方法[已废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31133-1994] 中速自动玻管拉管机完好要求和检查评定方法[现行]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31134-1994] 焊接机完好要求和检查评定方法[废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31136-1994] 磨粉机完好要求和检查评定方法[废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31137-1994] （钡）合金熔炼炉完好要求和检查评定方法[废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31184-1994] 芯柱焊接机完好要求和检查评定方法[废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31185-1994] 氢气退火炉完好要求和检查评定方法[废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31186-1994] 荫罩黑化炉完好要求和检查评定方法[废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31187-1994] 低熔点玻璃烧结炉完好要求和检查评定方法[废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31188-1994] 稳定处理炉完好要求和检查评定方法[废止]
发布时间：1997-01-01
实施时间：1997-01-01
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[SJ/T 31189-1994] 显像管玻壳屏、锥压机完好要求和检查评定方法[废止]
发布时间：1997-01-01
实施时间：1997-01-01
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