NF EN 62047-3:2006现行
Semiconductor Devices - Micro-electromechanical Devices - Part 3: Thin Film Standard Test Piece For Tensile Testing
出版：Association Francaise de Normalisation
专家解读视频
Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10[mu]m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices.
Indice de classement: C96-050-3 PR NF EN 62047-3 June 2005. (06/2005)
NBN EN 62047-3:2007 - Identical
DIN EN 62047-3 (2007-02) - Identical
BS EN 62047-3:2006 - Identical
IEC 62047-3 Ed. 1.0 - Identical
I.S. EN 62047-3:2006 - Identical
