IEC 62047-3 Ed. 1.0现行
Semiconductor devices - Micro-electromechanical devices Part 3: Thin film standard test piece for tensile testing
出版：International Electrotechnical Committee
专家解读视频
Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices. It is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.
PN EN 62047-3:2006 - Identical
I.S. EN 62047-3:2006 - Identical
NEN EN IEC 62047-3:2006 - Identical
OVE/ONORM EN 62047-3:2007 - Identical
BS EN 62047-3:2006 - Identical
DIN EN 62047-3 (2007-02) - Identical
NF EN 62047-3:2006 - Identical
