I.S. EN 62047-3:2006现行
Semiconductor Devices - Micro-electromechanical Devices Part 3: Thin Film Standard Test Piece for Tensile Testing
出版：National Standards Authority of Ireland
专家解读视频
Describes a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 micro meter, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices.
BS EN 62047-3 : 2006 - Identical
NBN EN 62047-3 : 2007 - Identical
NF EN 62047-3 : 2006 - Identical
EN 62047-3 : 2006 - Identical
DIN EN 62047-3 : 2007 - Identical
IEC 62047-3 : 1.0 - Identical
DIN EN 62047-3 : 2007 - Identical
BS EN 62047-3 : 2006 - Identical
BS EN 62047-3:2006 - Identical
DIN EN 62047-3 (2007-02) - Identical
NBN EN 62047-3:2007 - Identical
NF EN 62047-3:2006 - Identical
IEC 62047-3 Ed. 1.0 - Identical
