DIN EN 62047-3 : 2007现行
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 3: THIN FILM STANDARD TEST PIECE FOR TENSILE-TESTING
出版：German Institute for Standardisation (Deutsches Institut für Normung)
专家解读视频
Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10[mu]m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices.
NBN EN 62047-3 : 2007 - Identical
I.S. EN 62047-3:2006 - Identical
NF EN 62047-3 : 2006 - Identical
EN 62047-3 : 2006 - Identical
IEC 62047-3 : 1.0 - Identical
BS EN 62047-3 : 2006 - Identical
NBN EN 62047-3 : 2007 - Identical
NF EN 62047-3 : 2006 - Identical
I.S. EN 62047-3:2006 - Identical
BS EN 62047-3 : 2006 - Identical
