IEC 62047-26 : 1ED 2016现行
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 26: DESCRIPTION AND MEASUREMENT METHODS FOR MICRO TRENCH AND NEEDLE STRUCTURES
出版：International Electrotechnical Committee
专家解读视频
Defines descriptions of trench structure and needle structure in a micrometer scale.
NBN EN 62047-26 : 2016 - Identical
DIN EN 62047-26 : 2014 - Identical
NF EN 62047-26 : 2016 - Identical
DS EN 62047-26 : 2016 - Identical
SN EN 62047-26 : 2016 - Identical
CEI EN 62047-26 : 2016 - Identical
NEN EN IEC 62047-26 : 2016 - Identical
PN EN 62047-26 : 2016 - Identical
