CEI EN 62047-4 : 2011现行
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 4: GENERIC SPECIFICATION FOR MEMS
出版：Comitato Elettrotecnico Italiano
专家解读视频
基本信息
标准编号： CEI EN 62047-4 : 2011
发布时间：2011/1/1 0:00:00
标准类别：Standard
出版单位：Comitato Elettrotecnico Italiano
标准页数：26
标准简介
Defines generic specifications for micro-electromechanical Systems made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS.
