EN 62047-4 : 2010现行
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 4: GENERIC SPECIFICATION FOR MEMS
出版：European Committee for Standards - Electrical
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基本信息
标准编号： EN 62047-4 : 2010
标准类别：Standard
出版单位：European Committee for Standards - Electrical
标准页数：0
标准简介
Specifies generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS.
