CEI EN 62047-21 : 2016现行
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 21: TEST METHOD FOR POISSON'S RATIO OF THIN FILM MEMS MATERIALS
出版：Comitato Elettrotecnico Italiano
专家解读视频
基本信息
标准编号： CEI EN 62047-21 : 2016
标准类别：Standard
出版单位：Comitato Elettrotecnico Italiano
标准页数：0
标准简介
Defines the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 [mu]m.
