IEC 62047-21 : 1ED 2014现行
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 21: TEST METHOD FOR POISSON'S RATIO OF THIN FILM MEMS MATERIALS
出版：International Electrotechnical Committee
专家解读视频
Defines the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 [mu]m.
NEN EN IEC 62047-21 : 2014 - Identical
PN EN 62047-21 : 2014 - Identical
NF EN 62047-21 : 2014 - Identical
NBN EN 62047-21 : 2014 - Identical
DIN EN 62047-21 : 2015 - Identical
CEI EN 62047-21 : 2016 - Identical
BS EN 62047-21 : 2014 - Identical
DS EN 62047-21 : 2014 - Identical
