IEC 62047-4 : 1.0现行
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 4: GENERIC SPECIFICATION FOR MEMS
出版：International Electrotechnical Committee
专家解读视频
Describes generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS.
NBN EN 62047-4 : 2010 - Identical
DS EN 62047-4 : 2010 - Identical
CEI EN 62047-4 : 2011 - Identical
PN EN 62047-4 : 2011 - Identical
NEN EN IEC 62047-4 : 2010 - Identical
SAC GB/T 32817 : 2016 - Identical
BS EN 62047-4 : 2010 - Identical
NF EN 62047-4 : 2011 - Identical
DIN EN 62047-4 : 2011 - Identical
