BS EN 62047-4:2010现行
Semiconductor devices. Micro-electromechanical devices. Generic specification for MEMS
出版：British Standards Institution
专家解读视频
基本信息
标准编号： BS EN 62047-4:2010
发布时间：2010/11/30 0:00:00
标准类别：Standard
出版单位：British Standards Institution
标准页数：24
标准简介
Defines generic specifications for micro-electromechanical Systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS.
标准备注
© British Standards Institution 2013
等同采用的国际标准
IEC 62047-4 Ed. 1.0 - Identical
IEC 62047-4 : 1.0 - Identical
EN 62047-4 : 2010 - Identical
