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ISO 14644-3 : 2019现行

Cleanrooms and associated controlled environments — Part 3:Test methods

出版：International Organization for Standardization

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基本信息

标准编号： ISO 14644-3 : 2019

标准类别：Test Method

出版单位：International Organization for Standardization

标准页数：0

标准简介

This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions.

等同采用的国际标准

DS/EN ISO 14644-3:2019 - Identical

EN ISO 14644-3:2019 - Identical

I.S. EN ISO 14644-3:2019 - Identical

UNI EN ISO 14644-3:2019 - Identical

BS EN ISO 14644-3 : 2019 - Identical

NEN-EN-ISO 14644-3:2019 - Identical

SS-EN ISO 14644-3:2019 - Identical