
Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2019)
出版:Comite Europeen de Normalisation

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基本信息
标准编号: EN ISO 14644-3:2019
标准类别:Test Method
出版单位:Comite Europeen de Normalisation
标准页数:0
标准简介
This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions.
本标准替代的旧标准