ISO 14644-5 : 2004(R2018)现行
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 5: OPERATIONS
出版：International Organization for Standardization
专家解读视频
This part of ISO 14644 specifies basic requirements for cleanroom operations.
AS/NZS ISO 14644.5:2006 (R2016) - Identical
SS-EN ISO 14644-5 : 2004 - Identical
DS EN ISO 14644-5 : 2004 - Identical
NBR ISO 14644-5 : 2006 - Identical
PN EN ISO 14644-5 : 2005 - Identical
GOST R ISO 14644-5 : 2005 - Identical
