DS EN ISO 14644-10:2013现行
Cleanrooms And Associated Controlled Environments - Part 10: Classification Of Surface Cleanliness By Chemical Concentration
出版：Danish Standards
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基本信息
标准编号： DS EN ISO 14644-10:2013
发布时间：2013/4/2 0:00:00
标准类别：Standard
出版单位：Danish Standards
标准页数：44
标准简介
Specifies the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). Pertains to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
