IEC/IEEE 62659 Ed. 1.0现行
Nanomanufacturing - Large scale manufacturing for nanoelectronics
出版：International Electrotechnical Committee
专家解读视频
基本信息
标准编号： IEC/IEEE 62659 Ed. 1.0
发布时间：2015/9/30 0:00:00
标准类别：Standard
出版单位：International Electrotechnical Committee
标准页数：12
标准简介
IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.
