I.S. EN 62047-25:2016现行
Semiconductor Devices - Micro-electromechanical Devices Part 25: Silicon Based Mems Fabrication Technology - Measurement Method of Pull-press and Shearing Strength of Micro Bonding Area
出版：National Standards Authority of Ireland
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基本信息
标准编号： I.S. EN 62047-25:2016
发布时间：2016/12/6 0:00:00
标准类别：Standard
出版单位：National Standards Authority of Ireland
标准页数：60
标准简介
Defines the in-situ testing method to measure the bonding strength of micro bonding area which is fabricated by micromachining technologies used in silicon-based micro-electromechanical system (MEMS).
