SEMI S2:2021被替代
Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
出版：Semiconductor Equipment & Materials Institute
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基本信息
标准编号： SEMI S2:2021
标准类别：Standard
出版单位：Semiconductor Equipment & Materials Institute
标准页数：0
标准简介
This Safety Guideline provides industry accepted guidelines for semiconductor manufacturing equipment. By using SEMI S2, users and suppliers can procure and design equipment to minimize hazards related to equipment, facilities, worker environment, and personnel that could result in significant injury or death.
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