NS EN ISO 14644-10:2013现行
Cleanrooms And Associated Controlled Environments - Part 10: Classification Of Surface Cleanliness By Chemical Concentration (Iso 14644-10:2013)
出版：Norwegian Standards (Norges Standardiseringsforbund)
专家解读视频
基本信息
标准编号： NS EN ISO 14644-10:2013
发布时间：2013/6/1 0:00:00
标准类别：Standard
出版单位：Norwegian Standards (Norges Standardiseringsforbund)
标准页数：40
标准简介
Centers on the classification system of the surface contamination in cleanrooms due to chemical compounds or elements (including molecules, ions, atoms and particles).
