I.S. EN 62047-22:2014现行
Semiconductor Devices - Microelectromechanical Devices Part 22: Electromechanical Tensile Test Method for Conductive Thin Films on Flexible Substrates
出版：National Standards Authority of Ireland
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基本信息
标准编号： I.S. EN 62047-22:2014
发布时间：2014/10/24 0:00:00
标准类别：Standard
出版单位：National Standards Authority of Ireland
标准页数：32
标准简介
Defines a tensile test method to measure electromechanical properties of conductive thin micro-electromechanical systems (MEMS) materials bonded on non-conductive flexible substrates.
等同采用的国际标准
EN 62047-22:2014 - Identical
