SEMI F119:2021现行
Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution
出版：Semiconductor Equipment & Materials Institute
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基本信息
标准编号： SEMI F119:2021
标准类别：Test Method
出版单位：Semiconductor Equipment & Materials Institute
标准页数：0
标准简介
The purpose of this Test Method is to determine the relative resistance to pitting corrosion of the wetted surfaces of components intended for use in corrosive gas distribution systems for semiconductor manufacturing.
本标准替代的旧标准
