
Airborne Particulate Cleanliness Classes In Cleanrooms And Clean Zones - Revision E
出版:US Military Specs/Standards/Handbooks

专家解读视频
Gives classes of air cleanliness for airborne particulate levels in cleanrooms and zones. Gives methods for class verification and monitoring of air cleanliness. Coverage includes: airborne particulate cleanliness classes and U descriptions; verification and monitoring of airborne particulate cleanliness. Also contains detailed definitions and appendices.
E Notice 1 - Notice of Cancellation/Superseded by ISO 14644-1 and
ISO 14644-2
(03/2002)