
Cleanrooms and associated controlled environments Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017)
出版:German Institute for Standardisation (Deutsches Institut für Normung)

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基本信息
标准编号: DIN EN ISO 14644-13 (2017-11)
发布时间:2017/11/1 0:00:00
标准类别:Standard
出版单位:German Institute for Standardisation (Deutsches Institut für Normung)
标准页数:42
等同采用的国际标准
EN ISO 14644-13:2017 - Identical