ASTM F1709-97(2002)被替代
Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications
出版：American Society for Testing and Materials
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基本信息
标准编号： ASTM F1709-97(2002)
发布时间：2002/12/10 0:00:00
标准类别：Standard
出版单位：American Society for Testing and Materials
标准页数：3
标准简介
CONTAINED IN VOL. 10.04, 2006Covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices, and sets purity grade levels, physical attributes, analytical methods and packaging.
本标准替代的旧标准
替代本标准的新标准
