BS EN 62047-22:2014现行
Semiconductor Devices - Micro-Electromechanical Devices - Part 22: Electromechanical Tensile Test Method For Conductive Thin Films On Flexible Substrates
出版：British Standards Institution
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基本信息
标准编号： BS EN 62047-22:2014
发布时间：2014/10/31 0:00:00
标准类别：Standard
出版单位：British Standards Institution
标准页数：14
标准简介
Defines a tensile test method to measure electromechanical properties of conductive thin micro-electromechanical systems (MEMS) materials bonded on non-conductive flexible substrates.
等同采用的国际标准
EN 62047-22:2014 - Identical
