DIN EN 62047-16 (2012-11)被替代
Semiconductor devices - Micro-electromechanical devices Part 16: Test methods for determining residual stresses of MEMS films - Wafer curvature and cantilever beam deflection methods (IEC 47F/125/CD:2012)
出版：German Institute for Standardisation (Deutsches Institut für Normung)
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