ISO/DIS 14644-14 : 50.60 (2016)被替代
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION
出版：International Organization for Standardization
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基本信息
标准编号： ISO/DIS 14644-14 : 50.60 (2016)
标准类别：Standard
出版单位：International Organization for Standardization
标准页数：0
标准简介
Defines a methodology to assess the suitability of equipment (e. g. machinery, measuring equipment, process equipment, components, tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.
替代本标准的新标准
