I.S. EN 62047-17:2015现行
Semiconductor Devices - Micro-electromechanical Devices Part 17: Bulge Test Method for Measuring Mechanical Properties of Thin Films
出版：National Standards Authority of Ireland
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基本信息
标准编号： I.S. EN 62047-17:2015
发布时间：2015/7/28 0:00:00
标准类别：Standard
出版单位：National Standards Authority of Ireland
标准页数：66
标准简介
Defines the method for performing bulge tests on the free-standing film that is bulged within a window.
等同采用的国际标准
EN 62047-17:2015 - Identical
