UNI EN ISO 14644-14 : 2016现行
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION
出版：Ente Nazionale Italiano di Unificazione (UNI)
专家解读视频
基本信息
标准编号： UNI EN ISO 14644-14 : 2016
标准类别：Standard
出版单位：Ente Nazionale Italiano di Unificazione (UNI)
标准页数：0
标准简介
Defines a methodology to assess the suitability of equipment for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.
