ASTM F1389-00废止
Standard Test Methods for Photoluminescence Analysis of Single Crystal Silicon for III-V Impurities
出版：American Society for Testing and Materials
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基本信息
标准编号： ASTM F1389-00
发布时间：2000/6/10 0:00:00
标准类别：Standard
出版单位：American Society for Testing and Materials
标准页数：6
标准简介
CONTAINED IN VOL. 10.05, 2001Covers the simultaneous determination of electrically active boron, arsenic, phosphorus, and aluminum content in low-dislocation mono-crystalline silicon. The test methods can be used for samples that have majority dopant densities between approximately 5 x 10 to the power 15 and 1 x 10 to the power 11 atoms cubic cm.
