SEMI E185:2021被替代
Specification for 300 mm Tape Frame FOUP
出版：Semiconductor Equipment & Materials Institute
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基本信息
标准编号： SEMI E185:2021
标准类别：Standard
出版单位：Semiconductor Equipment & Materials Institute
标准页数：0
标准简介
The purpose of this Specification is to establish basic physical dimensions for the Tape Frame FOUP which is intended to be used to transport and store 300 mm tape frames, as specified by SEMI G74 and SEMI G87, within IC manufacturing facilities.
替代本标准的新标准
