IEC 62047-29 Ed. 1.0现行
Semiconductor devices - Micro-electromechanical devices Part 29: Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
出版：International Electrotechnical Committee
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基本信息
标准编号： IEC 62047-29 Ed. 1.0
发布时间：2017/11/22 0:00:00
标准类别：Standard
出版单位：International Electrotechnical Committee
标准页数：16
标准简介
Describes a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature.
