ISO/DIS 14644-13 : 60.00 (2017)被替代
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 13: CLEANING OF SURFACES TO ACHIEVE DEFINED LEVELS OF CLEANLINESS IN TERMS OF PARTICLE AND CHEMICAL CLASSIFICATIONS
出版：International Organization for Standardization
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基本信息
标准编号： ISO/DIS 14644-13 : 60.00 (2017)
标准类别：Standard
出版单位：International Organization for Standardization
标准页数：0
标准简介
Describes guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) classes and which techniques should be considered to achieve these specified levels.
替代本标准的新标准
