SEMI E184:2021现行
Specification for 300 mm Tape Frame FOUP Load Port
出版：Semiconductor Equipment & Materials Institute
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基本信息
标准编号： SEMI E184:2021
标准类别：Standard
出版单位：Semiconductor Equipment & Materials Institute
标准页数：0
标准简介
The purpose of this Specification is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 300 mm Tape Frame FOUP can be loaded and unloaded.
