IEC 62047-1 Ed. 2.0现行
Semiconductor devices - Micro-electromechanical devices Part 1: Terms and definitions
出版：International Electrotechnical Committee
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基本信息
标准编号： IEC 62047-1 Ed. 2.0
发布时间：2016/1/6 0:00:00
标准类别：Standard
出版单位：International Electrotechnical Committee
标准页数：66
标准简介
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.
本标准替代的旧标准
