I.S. EN 62047-21:2014现行
Semiconductor Devices - Microelectromechanical Devices Part 21: Test Method for Poisson's Ratio of Thin Film Mems Materials
出版：National Standards Authority of Ireland
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基本信息
标准编号： I.S. EN 62047-21:2014
发布时间：2014/10/27 0:00:00
标准类别：Standard
出版单位：National Standards Authority of Ireland
标准页数：38
标准简介
Defines the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 [mu]m.
