ISO/DIS 14644-5被替代
Cleanrooms And Associated Controlled Environments - Part 5: Operations
出版：International Organization for Standardization
专家解读视频
基本信息
标准编号： ISO/DIS 14644-5
标准类别：Draft
出版单位：International Organization for Standardization
标准页数：0
标准简介
Describes basic requirements for cleanroom operations.It is intended for those planning to use and operate acleanroom.
替代本标准的新标准
等同采用的国际标准
NEN EN ISO 14644-5:2004 - Identical
