
Semiconductor Devices - Micro-Electromechanical Devices - Part 22: Electromechanical Tensile Test Method For Conductive Thin Films On Flexible Substrates
出版:Nederlands Normalisatie Instituut

专家解读视频
基本信息
标准编号: NEN EN IEC 62047-22:2014
发布时间:2014/10/1 0:00:00
标准类别:Standard
出版单位:Nederlands Normalisatie Instituut
标准页数:20
标准简介
Defines a tensile test method to measure electromechanical properties of conductive thin micro-electromechanical systems (MEMS) materials bonded on non-conductive flexible substrates.
等同采用的国际标准
EN 62047-22:2014 - Identical